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ALD Equipment Market - By Equipment (Batch Reactors, Single-wafer Reactors, Spatial ALD Reactors, Remote Plasma ALD Reactors), By Deposition Method (Plasma-enhanced ALD, Thermal ALD, Spatial ALD, Power ALD), By Film Type, By Application & Forecast, 2024 – 2032

  • Report ID: GMI8346
  • Published Date: Feb 2024
  • Report Format: PDF

ALD Equipment Market Size

Atomic Layer Deposition (ALD) Equipment Market was valued at over USD 3.5 billion in 2023 and is estimated to register a CAGR of over 10% between 2024 and 2032. ALD equipment is used in semiconductor fabrication and various industries to deposit thin films with precise thickness and uniformity. It applies alternating gas-phase chemical reactions to create ultra-thin layers on substrates, enabling precise control over material properties.

Atomic Layer Deposition (ALD) Equipment Market

ALD equipment plays a critical role in the production of advanced semiconductor devices, coatings, and functional materials for electronics, energy storage, and other applications. The rising need for semiconductor devices brought on by the wide use of smartphones, IoT devices, and developing technologies, such as 5G and Artificial Intelligence (AI), is impacting the market for ALD equipment. ALD technology, which offers accurate and consistent thin-film deposition for enhanced performance and reliability, is essential for producing sophisticated semiconductor devices. As the demand for semiconductors continues to rise, there is a growing need for ALD equipment to meet the precise specifications of modern device fabrication processes. For instance, in March 2023, Tokyo Electron Limited. announced a new development facility at the Hosaka office in Nirasaki City, Yamanashi Prefecture. This expansion focuses on continuous technological advancements to make semiconductors more diverse and complex. To meet the increasing demand from the semiconductor industry, the company is also investing extensively in the development of new facilities.

The need for ALD equipment is attributed to the increasing industry adoption of nanotechnology. Applications in nanotechnology can benefit from ALD's ability to deposit ultra-thin films with atomic-level precision. The need for precise material deposition in a variety of industries including electronics, healthcare, and energy is fueling the adoption of ALD equipment, establishing it as a key technology in the advancement of nanotechnology-based innovations.

Challenges with material compatibility and integration hinder the ALD equipment market. It can be difficult to guarantee that ALD processes will work with a variety of substrates, materials, and device architectures. Extensive characterization and optimization are required to achieve proper adhesion, interface quality, and compatibility with current manufacturing processes. To promote the wide adoption of ALD technology, these issues need to be resolved, particularly in sectors where multi-layered structures or heterogeneous integration are necessary.

ALD Equipment Market Trends

The need for advanced semiconductor fabrication technologies, such as ALD, is driven by the growing demand for miniaturized electronic devices, such as wearables, smartphones, and Internet of Things (IoT) gadgets. The increasing utilization of nanotechnology in various sectors, such as electronics, healthcare, and energy, has made the accurate thin film deposition capabilities provided by ALD equipment indispensable. The need for ALD coatings in energy storage devices, solar cells, and LED lighting is increasing due to the growing emphasis on sustainability and energy efficiency. The growing applications of ALD outside of traditional semiconductor manufacturing, such as MEMS devices, sensors, and biomedical devices, are contributing to market expansion. For instance, in February 2020, Veeco Instruments Inc. launched a suite of MOCVD systems to facilitate the development of high-performance photonics devices. The MOCVD platform incorporates proprietary TurboDisc reactor technology for excellent film yield, uniformity, and device performance for various photonics applications. This model ramped up the production of VCSEL, Mini/Micro LED devices, and Edge-emitting Laser (EEL).


Continuous developments in ALD technology, such as increased throughput, better film uniformity, and the creation of new materials, are propelling market expansion by raising the appeal and applicability of ALD across a wider range of industries. These factors support the market's upward trajectory.

ALD Equipment Market Analysis

ALD Equipment Market, By Application, 2021-2032, (USD Billion)

Based on the application, the market is segmented into computing sector, data centers, consumer electronics, healthcare & biomedical, automotive, and energy & power. The computing sector segment accounted for a market share of over 30% in 2023.

  • The global market is seeing growth in the computing sector owing to many factors. There is a growing need for sophisticated semiconductor components with improved functionality and dependability due to the growing demand for high-performance computing devices such as servers, data centers, and gaming consoles. ALD technology enables the precise deposition of thin films on semiconductor substrates, increasing device performance and power efficiency.
  • Optimized semiconductor devices are needed for the wide use of AI, Machine Learning (ML), and big data analytics applications. These devices can be produced using fabrication processes enabled by ALD. The creation of cutting-edge computer architectures, such as neuromorphic and quantum computing, depends on ALD machinery for the production of specialized materials and structures, which fuels the demand for ALD in the computing industry.
ALD Equipment Market Share, By Deposition Method, 2023

Based on deposition method, the market is segmented into plasma-enhanced ALD, thermal ALD, spatial ALD, power ALD, and others. The spatial ALD segment is estimated to register 11% CAGR from 2024 to 2032.

  • Spatial ALD, a variation of traditional ALD, is gaining popularity due to its unique capabilities. Unlike conventional ALD, which deposits thin films uniformly across a substrate, spatial ALD allows for selective deposition in specific areas, providing greater flexibility and efficiency when manufacturing complex devices. This technology is especially useful for applications that require precise control over material placement such as MEMS devices, sensors, and advanced packaging.
  • Spatial ALD's ability to deposit thin films on non-planar and three-dimensional surfaces broadens its applications in emerging industries such as wearable electronics and biomedical devices. As the demand for highly integrated and miniaturized products increases, spatial ALD is poised to play a critical role in enabling advanced manufacturing processes, augmenting its adoption and growth in the market.
U.S. ALD Equipment Market Size, 2021-2032, (USD Million)

North America held a significant share of over 35% in the global ALD equipment market in 2023. The industry is expanding in North America owing to several factors. The region has a robust semiconductor sector, with businesses consistently investing in cutting-edge manufacturing technologies such as ALD. The development of new ALD equipment and applications is fueled by North America's status as a center for technological innovation and research. The rising demand for ALD in developing industries including aerospace, defense, and healthcare is fostering market expansion. Overall, the growth of the market in North America is credited to favorable economic conditions and technological advancements.

ALD Equipment Market Share

Major players operating in the ALD equipment industry are:

  • Aixtron SE
  • ASM International NV
  • Beneq Oyj
  • Cambridge NanoTech
  • EV Group (Evonik Industries AG)
  • Hitachi High-Technologies Corporation
  • Lam Research Corporation
  • Meyer Burger
  • Oxford Instruments Plc
  • Picosun Oy
  • SENTECH Instruments GmbH
  • SunChemical
  • TEL (Tokyo Electron Limited)
  • Veeco Instruments Inc.

ASM International NV holds a significant share in the ALD equipment industry. ASM International NV is a leading supplier of semiconductor manufacturing equipment, including ALD systems. Its ALD equipment enables precise deposition of thin films for advanced semiconductor devices, offering solutions for high-volume manufacturing and research applications. ASM International NV's ALD technology offers reliability, scalability, and the ability to meet the stringent requirements of the semiconductor industry.

Major players including ASM International NV, Lam Research Corporation, TEL (Tokyo Electron Limited), and Beneq Oyjare constantly implement strategic measures, such as geographical expansion, acquisition, mergers, collaborations, partnerships, and product or service launches, to gain market share.

ALD Equipment Industry News

  • In September 2022, ACM Research, Inc., a supplier of wafer processing solutions for the semiconductor and advanced Wafer-level Packaging (WLP) applications, announced the expansion of its 300mm Ultra Fn furnace dry processing platform with the introduction of its Ultra Fn A furnace tool. The system added thermal ALD to ACM's extensive list of supported furnace applications.
  • In June 2022, Applied Materials, Inc., a leading US-based semiconductor equipment company, acquired Picosun Oy. Picosun provides global industries with the most advanced ALD thin-film coating solutions. Picosun's ALD solutions enable a technological leap into the future with turn-key production processes and expertise in the field.

The ALD equipment market research report includes in-depth coverage of the industry with estimates & forecast in terms of revenue (USD Billion) from 2018 to 2032, for the following segments:

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Market, By Equipment

  • Batch Reactors
  • Single-wafer Reactors
  • Spatial ALD Reactors
  • Remote Plasma ALD Reactors

Market, By Deposition Method

  • Plasma Enhanced ALD
  • Thermal ALD
  • Spatial ALD
  • Power ALD
  • Others 

Market, By Film Type

  • Metal Film
  • Oxide Film
  • Sulfide Film
  • Nitride Film
  • Fluoride Film

Market, By Application

  • Computing Sector
  • Data Centers
  • Consumer Electronics
  • Healthcare and Biomedical
  • Automotive
  • Energy & Power

The above information is provided for the following regions and countries:

  • North America
    • U.S.
    • Canada
  • Europe
    • UK
    • Germany
    • France
    • Italy
    • Spain
    • Russia
    • Rest of Europe
  • Asia Pacific
    • China
    • India
    • Japan
    • South Korea
    • ANZ
    • Rest of Asia Pacific 
  • Latin America
    • Brazil
    • Mexico
    • Rest of Latin America
  • MEA
    • UAE
    • Saudi Arabia
    • South Africa
    • Rest of MEA


Authors: Suraj Gujar, Sandeep Ugale

Frequently Asked Questions (FAQ) :

Atomic layer deposition (ALD) equipment market size exceeded USD 3.5 billion in 2023 and is estimated to witness over 10% CAGR between 2024 and 2032 due to the rising need for semiconductor devices driven by the wide use of smartphones, and IoT devices

Atomic layer deposition equipment industry from the spatial ALD deposition method segment is estimated to register 11% CAGR from 2024 to 2032, owing to the surging requirement for providing greater flexibility and efficiency in manufacturing complex devices.

North America held over 35% share of the global ALD equipment industry share in 2023 driven by the presence of a robust semiconductor sector, with businesses consistently investing in cutting-edge manufacturing technologies

Some of the leading atomic layer deposition equipment firms include ASM International NV, Lam Research Corporation, TEL (Tokyo Electron Limited), Beneq Oyj, Picosun Oy, Oxford Instruments Plc, SENTECH Instruments GmbH, and Veeco Instruments Inc

ALD Equipment Market Scope

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Premium Report Details

  • Base Year: 2023
  • Companies covered: 15
  • Tables & Figures: 363
  • Countries covered: 21
  • Pages: 220
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